線長2.3mm,量程1.4mm,Z軸重復(fù)性0.1μm
線長10mm,量程6mm,X方向分辨率4.9μm
線長5.9mm,量程3mm,Z軸重復(fù)性0.1μm
線長5.9mm,量程2.4mm,Z軸重復(fù)性0.2μm
線長13mm,量程6mm,Z軸重復(fù)性0.15μm
線長4.3mm,量程0.7mm,Z軸重復(fù)性0.04μm
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